JPH0247302Y2 - - Google Patents

Info

Publication number
JPH0247302Y2
JPH0247302Y2 JP1982174597U JP17459782U JPH0247302Y2 JP H0247302 Y2 JPH0247302 Y2 JP H0247302Y2 JP 1982174597 U JP1982174597 U JP 1982174597U JP 17459782 U JP17459782 U JP 17459782U JP H0247302 Y2 JPH0247302 Y2 JP H0247302Y2
Authority
JP
Japan
Prior art keywords
spring plate
frp
spring
stepped portion
plate insertion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982174597U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5977632U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17459782U priority Critical patent/JPS5977632U/ja
Publication of JPS5977632U publication Critical patent/JPS5977632U/ja
Application granted granted Critical
Publication of JPH0247302Y2 publication Critical patent/JPH0247302Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Springs (AREA)
JP17459782U 1982-11-18 1982-11-18 Ｆｒｐ板ばね装置 Granted JPS5977632U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17459782U JPS5977632U (ja) 1982-11-18 1982-11-18 Ｆｒｐ板ばね装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17459782U JPS5977632U (ja) 1982-11-18 1982-11-18 Ｆｒｐ板ばね装置

Publications (2)

Publication Number Publication Date
JPS5977632U JPS5977632U (ja) 1984-05-25
JPH0247302Y2 true JPH0247302Y2 (en]) 1990-12-12

Family

ID=30380062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17459782U Granted JPS5977632U (ja) 1982-11-18 1982-11-18 Ｆｒｐ板ばね装置

Country Status (1)

Country Link
JP (1) JPS5977632U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3596547A1 (en) * 2017-03-16 2020-01-22 ASML Netherlands B.V. Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, method to control a gravity compensator having a negative stiffness, and spring

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55166536A (en) * 1979-06-12 1980-12-25 Nhk Spring Co Ltd Frp leaf spring

Also Published As

Publication number Publication date
JPS5977632U (ja) 1984-05-25

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